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5. LNE's metrological AFM
Since 2007, LNE (Laboratoire National de Métrologie et d'Essais), France's national metrology institute, has been developing its own metrological AFM. This reference instrument will eventually make it possible to offer calibration solutions in France for reference structures used mainly in near-field microscopy, but also in electron microscopy. LNE has chosen to develop this mAFM in its entirety, so as to retain control over the design choices that determine measurement uncertainty.
5.1 LNE's metrological AFM specifications
This mAFM is dedicated to high-accuracy dimensional measurement and calibration of transfer standards with maximum dimensions of 25 mm x 25 mm x 7 mm. For directly traceable dimensional measurements, it uses interferometers with wavelength-calibrated...
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LNE's metrological AFM
Performance
Bibliography
- (1) - The Royal Society & The Royal Academy of Engineering - Nanoscience and nanotechnologies : opportunities and uncertainties - http://www.nanotec.org.uk/finalReport.htm (juillet 2004).
- (2)...
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