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2. Optical lithography: issues and challenges
Optical lithography, also known as photolithography, is indisputably the main method for mass-producing microelectronics circuits. It involves etching the patterns to be reproduced (circuits) onto a photosensitive polymer. This polymer pattern is then transferred to the silicon wafer on which the thin polymer layer has been deposited. Since the 1970s, this technique has undergone a number of evolutions, described in detail in reference . These developments have involved :
the wavelength of light ;
photosensitive resin performance (materials, development techniques, etc.) ;
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Optical lithography: issues and challenges
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The Ultimate Scientific and Technical Reference