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Article | REF: NM250 V1

Nanofluidic systems. Technologies and applications

Authors: Patrick ABGRALL, Aurélien BANCAUD, Pierre JOSEPH

Publication date: July 10, 2009

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2. Manufacturing technologies

The current boom in nanofluidics stems largely from recent advances in nanofabrication and its combination with fluid handling tools [2][3][4] .

First, we present an overview of methods that enable the realization of model structures for fluid control, at nanometric scales.

a) Different nanochannel geometries: at least one dimension is smaller than 100 nm. Nanoslots with low aspect ratio h/L (left), and nanochannels with aspect ratio close to 1. b) Scanning electron microscopy images of silicon nanoslots and nanochannels, before closure.
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