Article | REF: NM550 V1

Forming nano-objects in crystal molds

Author: Chaouqi MISBAH

Publication date: October 10, 2005 | Lire en français

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    4. Manufacture of nanostructures using the photolithography technique

    On photolithography:

    Surface wave filters [E 2 200] by P. Defranould and P. Wright

    Near-field optical microscopy [P 862] by D. Van Labeke

    In the absence of intelligent machines, as nature does, that...

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    Manufacture of nanostructures using the photolithography technique