Article | REF: NM550 V1

Forming nano-objects in crystal molds

Author: Chaouqi MISBAH

Publication date: October 10, 2005

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4. Manufacture of nanostructures using the photolithography technique

On photolithography:

Surface wave filters [E 2 200] by P. Defranould and P. Wright

Near-field optical microscopy [P 862] by D. Van Labeke

In the absence of intelligent machines, as nature does, that can manufacture nanostructures on a reasonable timescale, we have had to devise processes that are fast and efficient enough to produce them on the scale required for fundamental research and industrial applications....

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Manufacture of nanostructures using the photolithography technique