Article | REF: D3342 V2

Microbatteries -Microsources of energy in thin layers

Authors: Alain LEVASSEUR, Brigitte PECQUENARD, Philippe VINATIER, Raphaël SALOT, Frédéric LE CRAS, Michel MARTIN

Publication date: May 10, 2009

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4. Application technologies

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4.1 Manufactured by PVD

The abbreviation PVD (Physical Vapor Deposition) refers to a family of physical thin-film deposition techniques. It includes techniques based on ion sputtering and those employing thermal evaporation. Almost all PVD techniques are used to produce microbatteries. The sequence for producing a PVD microbattery in the laboratory is typically as follows:

  • preparation of the appropriate substrate (cleaning outside the deposition machine, cleaning in situ, heating);

  • placing the "electrical collectors" mask in a glove box under argon ;

  • ...

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