Article | REF: R2918 V1

Measurement of thermal conductivity using the 3-omega method

Author: Mickaël BEAUDHUIN

Publication date: December 10, 2019

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4. Glossary

Synchronous detection amplifier; Lock-in amplifier

Technique for extracting low-amplitude signals embedded in high noise.

Physical Vapor Deposition; Dépôt physique en phase vapeur

A technique for depositing thin films in a vacuum. It includes evaporation techniques, sputtering, pulsed laser ablation, molecular jet epitaxy and electric arc deposition.

Chemical Vapor Deposition; Dépôt chimique en phase vapeur

A technique for depositing thin films in a vacuum. Examples include atmospheric pressure deposition (APCVD), reduced pressure deposition (LPCVD), vacuum deposition (UHVCVD), aerosol-assisted deposition (AACVD), liquid injection deposition (DLCVD), plasma-assisted deposition (PECVD, RPECVD), microwave plasma deposition (MPCVD); atomic layer deposition (ALCVD); using...

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