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Article | REF: R1390 V1

Surface metrology

Author: Patrick BOUCHAREINE

Publication date: September 10, 1999

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4. Controlling defects of short spatial duration. Laser beam profilometry

Other optical techniques derived from autocollimation have been developed in the laboratory to test, with optimum sensitivity, the straightness of optical surfaces up to several tens of centimetres in diameter, but with spatial periods which, without entering the realm of roughness, are more in the realm of what we have called undulations. Some geometrical optics fixtures give excellent results in this field.

Optical angle profilometer
Figure 20  -...
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Controlling defects of short spatial duration. Laser beam profilometry
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