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3. Experimental setup
A classic installation includes :
a vacuum chamber and its pumping unit;
a vapour phase source;
power supplies for the cathode and the vapor-phase source.
3.1 Vacuum device
The pumping device used depends on the nature of the material to be deposited. If the material is not very sensitive to oxygen or nitrogen, pumping can be carried out by Roots pumps, which provide rapid evacuation and sufficient ultimate pressure (p " 1.5 × 10 – 2 Pa). In most cases, however, deposits are sensitive to residual gases, and a good ultimate vacuum (p " 10 –4 ...
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Experimental setup
Main applications
Bibliography
Specialist articles
Manufacturers. Suppliers
(Non-exhaustive list)
Vacuum equipment and vacuum deposits in general
CIT Alcatel.
Balzers SA.
Eta Electrotech (Sté).
Leybold Heraeus Sogev SA.
As regards ionic deposition in particular, only Balzers, Leybold and Electrotech seem to be working in this field.
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