Article | REF: NM5110 V1

Nanoscale heat transfer

Authors: Jean-Jacques GREFFET, Sebastian VOLZ

Publication date: April 10, 2007

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5. Some applications

5.1 Thermal lithography

One application of thermal heating is nanolithography. Recent experiments at Berkeley have shown that it is possible to modify the surface state of a polymer with a resolution of the order of 20 nm. The technique is based on rapid, highly confined heating of the polymer. To achieve this, a femtosecond laser pulse is used to illuminate a tip approaching the substrate. The tip's role is to exalt the electromagnetic field so that, in the vicinity of the tip, the material...

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Some applications